Media type: Electronic Conference Proceeding Title: Dissolution behavior of bis-trifluoromethyl-carbinol-substituted polynorbornenes Contributor: Hoskins, Trevor; Chung, Won Jae; Ludovice, Peter J.; Henderson, Clifford L.; Seger, Larry; Rhodes, Larry F.; Shick, Robert A. imprint: SPIE, 2003 Published in: Advances in Resist Technology and Processing XX Extent: Language: Not determined DOI: 10.1117/12.485145 ISSN: 0277-786X Origination: Footnote: