Media type: Electronic Conference Proceeding Title: Contactless laser bending of silicon microstructures Contributor: Exner, Horst; Loschner, Udo Published: SPIE, 2003 Published in: SPIE Proceedings (2003) Extent: Language: Not determined DOI: 10.1117/12.498961 ISSN: 0277-786X Origination: University thesis: Footnote: