Media type: Electronic Conference Proceeding Title: Characterization of a 100-nm 1D pitch standard by metrological SEM and SFM Contributor: Haessler-Grohne, Wolfgang; Dziomba, Thorsten; Frase, Carl G.; Bosse, Harald; Prochazka, Jerry imprint: SPIE, 2004 Published in: Metrology, Inspection, and Process Control for Microlithography XVIII Extent: Language: Not determined DOI: 10.1117/12.536285 ISSN: 0277-786X Origination: Footnote: