Media type: Electronic Conference Proceeding Title: FEM calculations on laser bending of silicon with a moving laser source Contributor: Loeschner, Udo; Exner, Horst Published: SPIE, 2004 Published in: SPIE Proceedings (2004) Extent: Language: Not determined DOI: 10.1117/12.544814 ISSN: 0277-786X Origination: University thesis: Footnote: