Media type: Electronic Conference Proceeding Title: Packaging and characterization of micro-opto-electro-mechanical systems Contributor: Saupe, Ray; Otto, Thomas; Stock, Volker; Fritzsch, Uwe; Gessner, Thomas Published: SPIE, 2004 Published in: SPIE Proceedings (2004) Extent: Language: Not determined DOI: 10.1117/12.558489 ISSN: 0277-786X Origination: Footnote: