Media type: Electronic Conference Proceeding Title: Assist feature placement analysis using focus sensitivity models Contributor: Melvin III, Lawrence S.; Mayhew, Jeffrey P.; Painter, Benjamin D.; Barnes, Levi D. imprint: SPIE, 2006 Published in: 22nd European Mask and Lithography Conference Extent: Language: Not determined DOI: 10.1117/12.692745 ISSN: 0277-786X Origination: Footnote: