Media type: Electronic Conference Proceeding Title: Direct structuring of solids by EUV radiation from a table-top laser produced plasma source Contributor: Barkusky, Frank; Bayer, Armin; Peth, Christian; Mann, Klaus imprint: SPIE, 2009 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.822243 ISSN: 0277-786X Origination: Footnote: