Media type: Electronic Conference Proceeding Title: The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM Contributor: Helmbrecht, Michael A.; He, Min; Kempf, Carl J.; Rhodes, Patrick imprint: SPIE, 2009 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.828384 ISSN: 0277-786X Origination: Footnote: