Media type: Electronic Conference Proceeding Title: Feasibility study of optical/e-beam complementary lithography Contributor: Hohle, Christoph; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Jaschinsky, Philipp; Kahlenberg, Frank; Klein, Christof; Klikovits, Jan; Paul, Jan; Rudolph, Matthias; Thrun, Xaver Published: SPIE, 2012 Published in: Alternative Lithographic Technologies IV (2012) Extent: Language: Not determined DOI: 10.1117/12.916386 ISSN: 0277-786X Origination: Footnote: