Media type: Electronic Conference Proceeding Title: Two-dimensional array of AR-coated diffractive microlenses fabricated by thin-film deposition Contributor: Pawlowski, Edgar; Engel, Herbert; Ferstl, Margit; Fuerst, Walther; Kuhlow, Berndt imprint: SPIE, 1993 Published in: Miniature and Micro-Optics: Fabrication and System Applications II Extent: Language: Not determined DOI: 10.1117/12.138880 ISSN: 0277-786X Origination: Footnote: