Media type: Electronic Conference Proceeding Title: Multilevel micro-structuring of glassy carbon for precision glass molding of diffractive optical elements Contributor: Prater, Karin; Dukwen, Julia; Scharf, Toralf; Herzig, Hans Peter; Plöger, Sven; Hermerschmidt, Andreas imprint: SPIE, 2015 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2080762 ISSN: 0277-786X Origination: Footnote: