Media type: Electronic Conference Proceeding Title: Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices Contributor: Lisec, Thomas; Kreutzer, Martin; Wenk, Beatrice; Wagner, Bernd imprint: SPIE, 1995 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.221285 ISSN: 0277-786X Origination: Footnote: