• Media type: Electronic Conference Proceeding
  • Title: Radio frequency and microwave plasma for optical thin-film deposition
  • Contributor: Otto, Juergen; Paquet, Volker; Kersten, Ralf T.; Etzkorn, Heinz-Werner; Brusasco, Raymond M.; Britten, Jerald A.; Campbell, Jack H.; Thorsness, J. B.
  • imprint: SPIE, 1990
  • Published in: SPIE Proceedings
  • Extent:
  • Language: Not determined
  • DOI: 10.1117/12.22371
  • ISSN: 0277-786X
  • Origination:
  • Footnote: