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Media type:
Electronic Conference Proceeding
Title:
Radio frequency and microwave plasma for optical thin-film deposition
Contributor:
Otto, Juergen;
Paquet, Volker;
Kersten, Ralf T.;
Etzkorn, Heinz-Werner;
Brusasco, Raymond M.;
Britten, Jerald A.;
Campbell, Jack H.;
Thorsness, J. B.