A Study on Surface Formation Mechanism by Molecular Beam Epitaxy. (1st Report). An Effect of Energy and Density of Adsorbed Molecules upon Si-Si Homo-Epitaxial Growth Mechanism
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Media type:
E-Article
Title:
A Study on Surface Formation Mechanism by Molecular Beam Epitaxy. (1st Report). An Effect of Energy and Density of Adsorbed Molecules upon Si-Si Homo-Epitaxial Growth Mechanism
Contributor:
KANEKO, Arata;
FURUKAWA, Yuji
Published:
Japan Society for Precision Engineering, 2000
Published in:
Journal of the Japan Society for Precision Engineering, 66 (2000) 5, Seite 735-741