Media type: E-Article Title: Surface Damage Induced by Reactive Ion Etching in n- Type Silicon Contributor: Poggi, Antonella; Susi, E. imprint: Trans Tech Publications, Ltd., 1995 Published in: Solid State Phenomena Language: Not determined DOI: 10.4028/www.scientific.net/ssp.47-48.383 ISSN: 1662-9779 Keywords: Condensed Matter Physics ; General Materials Science ; Atomic and Molecular Physics, and Optics Origination: Footnote: