Media type: E-Article Title: Characterization of HF Cleaning of Ion-Implanted Si Surfaces Contributor: Kondoh, E.; Baklanov, Mikhail R.; Maex, Karen imprint: Trans Tech Publications, Ltd., 1998 Published in: Solid State Phenomena Language: Not determined DOI: 10.4028/www.scientific.net/ssp.65-66.271 ISSN: 1662-9779 Keywords: Condensed Matter Physics ; General Materials Science ; Atomic and Molecular Physics, and Optics Origination: Footnote: