• Media type: E-Article
  • Title: Laser Direct Patterning of Organic Dielectric Passivation Layer for Fabricating Amorphous Silicon Thin-Film Transistors
  • Contributor: Chen, Chao-Nan; Su, Kuo-Hui; Chen, Yeong-Chin
  • Published: IOP Publishing, 2011
  • Published in: Japanese Journal of Applied Physics, 50 (2011) 6R, Seite 066501
  • Language: Not determined
  • DOI: 10.7567/jjap.50.066501
  • ISSN: 0021-4922; 1347-4065
  • Keywords: General Physics and Astronomy ; Physics and Astronomy (miscellaneous) ; General Engineering
  • Origination:
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