Media type: E-Article Title: A MEMS tilt sensor with expanded operating range and improved sensitivity Contributor: Choi, Young Chan; Choi, Ju Chan; Kong, Seong Ho Published: IOP Publishing, 2014 Published in: Japanese Journal of Applied Physics, 53 (2014) 6S, Seite 06JM12 Language: Not determined DOI: 10.7567/jjap.53.06jm12 ISSN: 0021-4922; 1347-4065 Keywords: General Physics and Astronomy ; Physics and Astronomy (miscellaneous) ; General Engineering Origination: Footnote: