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Medientyp: E-Artikel Titel: Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate Beteiligte: Campanella, Humberto; Nouet, Pascal; Uranga, Arantxa; de Paco, Pedro; Barniol, Nuria; Esteve, Jaume Erschienen: Wiley, 2008 Erschienen in: Microwave and Optical Technology Letters, 50 (2008) 1, Seite 4-7 Sprache: Englisch DOI: 10.1002/mop.22986 ISSN: 0895-2477; 1098-2760 Schlagwörter: Electrical and Electronic Engineering ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Entstehung: Anmerkungen: Beschreibung: AbstractOn‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model‐based de‐embedding of the FBAR parameters. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 4–7, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22986