Skip to contents Liu, Chang [Author] ; Mungurwadi, Vaishali B. [Other] Foundations of MEMS - [2. ed., international ed.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Upper Saddle River [u.a.]: Prentice Hall [u.a.], c 2012 Published in: Pearson international edition Lee, Ki Bang [Author] Principles of microelectromechanical systems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Hoboken, NJ: WILEY [u.a.], c 2011 Gianchandani, Yogesh B. [Editor]; Tabata, Osamu [Editor]; Zappe, Hans P. [Other] Comprehensive microsystems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Amsterdam; Heidelberg [u.a.]: Elsevier, 20XX- Maluf, Nadim [Author] An introduction to microelectromechanical systems engineering Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston [u.a.]: Artech House, 2000 Published in: Artech House microelectromechanical systems library Niedermayer, Michael [Author] Cost driven design of smart microsystems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwood, Mass. [u.a.]: Artech House, c 2012 Published in: Artech House integrated microsystems series Hartzell, Allyson L. [Author]; Da Silva, Mark G. [Author]; Shea, Herbert R. [Author] MEMS reliability Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY; Heidelberg [u.a.]: Springer, c2011 Published in: MEMS reference shelf Uchino, Kenji [Author] FEM and micromechatronics with ATILA software Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton: CRC, 2008 Giurgiutiu, Victor [Author]; Lyshevski, Sergey Edward [Author] Micromechatronics : modeling, analysis, and design with MATLAB Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 2004 Published in: Nano- and microscience, engineering, technology, and medicine series Ehrfeld, Wolfgang [Editor]; Bähr, Jochen [Other] Handbuch Mikrotechnik Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. München [u.a.]: Hanser, 2002 Folch, Albert [Author] Introduction to BioMEMS Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, c 2013 Kubby, Joel A. [Author] A guide to hands-on MEMS design and prototyping - [1. publ.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Cambridge [u. a.]: Cambridge Univ. Press, 2011 Lobontiu, Nicolae [Author] Dynamics of microelectromechanical systems Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY: Springer, 2007 Published in: Microsystems ; 17 Korvink, Jan G. [Editor] MEMS : a practical guide to design, analysis, and applications Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwich, NY: Andrew, 2006 ; Heidelberg: Springer, 2006 Published in: Micro-electro-mechanical systems Leondes, Cornelius T. [Editor] MEMS NEMS handbook : techniques and applications Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY: Springer, 20XX- Banks, Danny [Author] Microengineering, MEMS, and interfacing : a practical guide Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC/Taylor & Fancis, 2006 Published in: Mechanical engineering ; 199 Maluf, Nadim [Author]; Williams, Kirt [Author] An introduction to microelectromechanical systems engineering - [2. ed.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston, Mass. [u.a.]: Artech House, 2004 Published in: Microelectromechanical systems series Nguyen, Nam-Trung [Author]; Wereley, Steven T. [Author]; Shaegh, Seyed Ali Mousavi [Author] Fundamentals and applications of microfluidics - [Third edition] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston; London: Artech House, [2019] Published in: Artech House integrated microsystems series Iniewski, Krzysztof [Editor] Integrated microsystems : electronics, photonics, and biotechnology Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, c 2012 Published in: Devices, circuits, and systems Saile, Volker [Editor] LIGA and its applications - [1. Aufl.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Weinheim: Wiley-VCH-Verl., 2009 Published in: Advanced micro & nanosystems ; 7 Lang, Jeffrey H. [Editor] Multi-wafer rotating MEMS machines : turbines, generators, and engines Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York; Heidelberg [u.a.]: Springer, 2009 Published in: MEMS reference shelf
Liu, Chang [Author] ; Mungurwadi, Vaishali B. [Other] Foundations of MEMS - [2. ed., international ed.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Upper Saddle River [u.a.]: Prentice Hall [u.a.], c 2012 Published in: Pearson international edition
Lee, Ki Bang [Author] Principles of microelectromechanical systems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Hoboken, NJ: WILEY [u.a.], c 2011
Gianchandani, Yogesh B. [Editor]; Tabata, Osamu [Editor]; Zappe, Hans P. [Other] Comprehensive microsystems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Amsterdam; Heidelberg [u.a.]: Elsevier, 20XX-
Maluf, Nadim [Author] An introduction to microelectromechanical systems engineering Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston [u.a.]: Artech House, 2000 Published in: Artech House microelectromechanical systems library
Niedermayer, Michael [Author] Cost driven design of smart microsystems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwood, Mass. [u.a.]: Artech House, c 2012 Published in: Artech House integrated microsystems series
Hartzell, Allyson L. [Author]; Da Silva, Mark G. [Author]; Shea, Herbert R. [Author] MEMS reliability Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY; Heidelberg [u.a.]: Springer, c2011 Published in: MEMS reference shelf
Uchino, Kenji [Author] FEM and micromechatronics with ATILA software Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton: CRC, 2008
Giurgiutiu, Victor [Author]; Lyshevski, Sergey Edward [Author] Micromechatronics : modeling, analysis, and design with MATLAB Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 2004 Published in: Nano- and microscience, engineering, technology, and medicine series
Ehrfeld, Wolfgang [Editor]; Bähr, Jochen [Other] Handbuch Mikrotechnik Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. München [u.a.]: Hanser, 2002
Folch, Albert [Author] Introduction to BioMEMS Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, c 2013
Kubby, Joel A. [Author] A guide to hands-on MEMS design and prototyping - [1. publ.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Cambridge [u. a.]: Cambridge Univ. Press, 2011
Lobontiu, Nicolae [Author] Dynamics of microelectromechanical systems Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY: Springer, 2007 Published in: Microsystems ; 17
Korvink, Jan G. [Editor] MEMS : a practical guide to design, analysis, and applications Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwich, NY: Andrew, 2006 ; Heidelberg: Springer, 2006 Published in: Micro-electro-mechanical systems
Leondes, Cornelius T. [Editor] MEMS NEMS handbook : techniques and applications Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY: Springer, 20XX-
Banks, Danny [Author] Microengineering, MEMS, and interfacing : a practical guide Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC/Taylor & Fancis, 2006 Published in: Mechanical engineering ; 199
Maluf, Nadim [Author]; Williams, Kirt [Author] An introduction to microelectromechanical systems engineering - [2. ed.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston, Mass. [u.a.]: Artech House, 2004 Published in: Microelectromechanical systems series
Nguyen, Nam-Trung [Author]; Wereley, Steven T. [Author]; Shaegh, Seyed Ali Mousavi [Author] Fundamentals and applications of microfluidics - [Third edition] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boston; London: Artech House, [2019] Published in: Artech House integrated microsystems series
Iniewski, Krzysztof [Editor] Integrated microsystems : electronics, photonics, and biotechnology Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, c 2012 Published in: Devices, circuits, and systems
Saile, Volker [Editor] LIGA and its applications - [1. Aufl.] Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Weinheim: Wiley-VCH-Verl., 2009 Published in: Advanced micro & nanosystems ; 7
Lang, Jeffrey H. [Editor] Multi-wafer rotating MEMS machines : turbines, generators, and engines Books View online Schließen Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York; Heidelberg [u.a.]: Springer, 2009 Published in: MEMS reference shelf
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