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  1. Williams, Max Owen [Author] ; Zacharias, Margit [Degree supervisor] Albert-Ludwigs-Universität Freiburg Professur für Nanotechnologie, Albert-Ludwigs-Universität Freiburg Fakultät für Angewandte Wissenschaften

    ˜Theœ role of metal catalysts during metal-assisted chemical etching of silicon

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    Freiburg: Universität, 2021

  2. Geyer, Nadine [Author] ; Leipner, Hartmut S. [Degree supervisor]; Wehrspohn, Ralf [Degree supervisor]; Hanke, Michael [Degree supervisor]

    Nanostrukturierung von Silizium durch metallinduziertes Nassätzen

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    Halle, Saale: Universitäts- und Landesbibliothek Sachsen-Anhalt, 2011

  4. Greil, Stefanie Margita [Author] ; Rademann, Klaus [Degree supervisor]; Rech, Bernd [Degree supervisor]

    In situ Photolumineszenz bei Ätzprozessen zur Nanostrukturierung von amorphem und kristallinem Silicium

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    Berlin: Humboldt Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät I, 2013

  6. Gries, Stella Inge Martha [Author]; Brinker, Manuel [Author]; Zeller-Plumhoff, Berit [Author]; Rings, Dagmar [Author]; Krekeler, Tobias [Author]; Longo, Elena [Author]; Greving, Imke [Author]; Huber, Patrick [Author] ; Technische Universität Hamburg, Technische Universität Hamburg Institute for Materials and X-Ray Physics, Technische Universität Hamburg Betriebseinheit Elektronenmikroskopie BEEM

    Wafer-scale fabrication of hierarchically porous silicon and silica by active nanoparticle-assisted chemical etching and pseudomorphic thermal oxidation

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    2023

    Published in: Small ; 19(2023), 22, Artikel-ID 2206842, Seite 1-10

  11. Brodoceanu, Daniel [Author]; Alhmoud, Hashim Z. [Author]; Elnathan, Roey [Author]; Delalat, Bahman [Author]; Völcker, Nicolas Hans [Author]; Kraus, Tobias [Author] ; Leibniz-Institut für Neue Materialien

    Fabrication of silicon nanowire arrays by near-field laser ablation and metal-assisted chemical etching

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    2016

    Published in: Nanotechnology ; 27(2016), 7, Seite 075301