Skip to contents Reinhardt, Karen A. [Editor]; Kern, Werner [Editor] Handbook of silicon wafer cleaning technology - [Third edition] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Oxford; Cambridge: William Andrew, [2018] Reinhardt, Karen A. [Editor]; Kern, Werner [Other] Handbook of silicon wafer cleaning technology - [2. ed.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwich, NY: William Andrew, 2008 Published in: Materials science & process technology series Hattori, Takeshi [Editor] Ultraclean surface processing of silicon wafers : secrets of manufacturing Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 1998 Iyer, Subramanian S. [Editor]; Auberton-Hervé, Andre J. [Other] ; Institution of Electrical Engineers Silicon wafer bonding technology : for VLSI and MEMS applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. London: Institution of Electrical Engineers, 2002 Published in: Electronic Materials Information Service: EMIS processing series ; 1 Zimmermann, Sven [Author] Entwicklung einer Technologie zur Herstellung eines neuartigen Substrates mit strukturierten vergrabenen Kobaltdisilizidschichten für die gemeinsame Integration bipolarer und unipolarer Bauteile auf einem SOI-Wafer Books View online Schließen > Access https://d-nb.info/986376264/34 kostenfrei http://archiv.tu-chemnitz.de/pub/2007/0168 Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Zimmermann, Sven [Author] Entwicklung einer Technologie zur Herstellung eines neuartigen Substrates mit strukturierten vergrabenen Kobaltdisilizidschichten für die gemeinsame Integration bipolarer und unipolarer Bauteile auf einem SOI-Wafer Books View online Schließen > Access More information on the full text Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2007 Schwarz, Markus [Author] Entwicklung von siliziumbasierten Mikro-Schaltern zur Realisierung von reproduzierbaren Array-Verschaltungen : development of silicon-based micro-switches for the realization of reproducible array interconnections Books View online Schließen > Access https://d-nb.info/124111725X/34 kostenfrei Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Saarbrücken: Saarländische Universitäts- und Landesbibliothek, 2021 Skwierawski, Piotr Henryk [Author] ; Weber, M. [Degree supervisor] Optische Detektorauslese mit Siliziumphotonik Books View online Schließen > Access https://d-nb.info/111096952X/34 kostenfrei Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Karlsruhe: KIT-Bibliothek, 2016 Letzkus, Florian [Author] Membran- und Struktur-Ätzprozesse für großflächige Projektionsmasken in der Nanolithografie Books View online Schließen > Access https://d-nb.info/969152914/34 kostenfrei http://elib.uni-stuttgart.de/opus/volltexte/2003/1438/index.html Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this.
Reinhardt, Karen A. [Editor]; Kern, Werner [Editor] Handbook of silicon wafer cleaning technology - [Third edition] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Oxford; Cambridge: William Andrew, [2018]
Reinhardt, Karen A. [Editor]; Kern, Werner [Other] Handbook of silicon wafer cleaning technology - [2. ed.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Norwich, NY: William Andrew, 2008 Published in: Materials science & process technology series
Hattori, Takeshi [Editor] Ultraclean surface processing of silicon wafers : secrets of manufacturing Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 1998
Iyer, Subramanian S. [Editor]; Auberton-Hervé, Andre J. [Other] ; Institution of Electrical Engineers Silicon wafer bonding technology : for VLSI and MEMS applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. London: Institution of Electrical Engineers, 2002 Published in: Electronic Materials Information Service: EMIS processing series ; 1
Zimmermann, Sven [Author] Entwicklung einer Technologie zur Herstellung eines neuartigen Substrates mit strukturierten vergrabenen Kobaltdisilizidschichten für die gemeinsame Integration bipolarer und unipolarer Bauteile auf einem SOI-Wafer Books View online Schließen > Access https://d-nb.info/986376264/34 kostenfrei http://archiv.tu-chemnitz.de/pub/2007/0168 Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this.
> Access https://d-nb.info/986376264/34 kostenfrei http://archiv.tu-chemnitz.de/pub/2007/0168 Show more show less
Zimmermann, Sven [Author] Entwicklung einer Technologie zur Herstellung eines neuartigen Substrates mit strukturierten vergrabenen Kobaltdisilizidschichten für die gemeinsame Integration bipolarer und unipolarer Bauteile auf einem SOI-Wafer Books View online Schließen > Access More information on the full text Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2007
Schwarz, Markus [Author] Entwicklung von siliziumbasierten Mikro-Schaltern zur Realisierung von reproduzierbaren Array-Verschaltungen : development of silicon-based micro-switches for the realization of reproducible array interconnections Books View online Schließen > Access https://d-nb.info/124111725X/34 kostenfrei Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Saarbrücken: Saarländische Universitäts- und Landesbibliothek, 2021
Skwierawski, Piotr Henryk [Author] ; Weber, M. [Degree supervisor] Optische Detektorauslese mit Siliziumphotonik Books View online Schließen > Access https://d-nb.info/111096952X/34 kostenfrei Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Karlsruhe: KIT-Bibliothek, 2016
Letzkus, Florian [Author] Membran- und Struktur-Ätzprozesse für großflächige Projektionsmasken in der Nanolithografie Books View online Schließen > Access https://d-nb.info/969152914/34 kostenfrei http://elib.uni-stuttgart.de/opus/volltexte/2003/1438/index.html Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this.
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