Skip to contents Rai-Choudhury, P. [Other] Handbook of microlithography, micromachining, and microfabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Bellingham, Wash.: SPIE Optical Engineering Pr., 19XX- ; London: Institution of Electrical Engineers, 19XX- Published in: IEE materials and devices series ; .- SPIE Press monograph ; . Valiev, Kamilʹ A. [Author] ; Rakov, Aleksandr V. [Other] Fizičeskie osnovy submikronnoj litografii v mikroėlektronike Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Moskva: Radio i Svjazʹ, 1984 Varadan, Vijay K. [Author]; Jiang, Xiaoning [Author]; Varadan, Vasundara V. [Author] Microstereolithography and other fabrication techniques for 3D MEMS Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Chichester; Weinheim [u.a.]: Wiley, 2001 Brewer, George R. [Adapter] Ėlektronno-lučevaja technologija v izgotovlenii mikroėlektronnych priborov Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Moskva: Radio i Svjazʹ, 1984 Brewer, George R. [Editor]; Ballantyne, J. P. [Other] Electron-beam technology in microelectronic fabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY [u.a.]: Acad. Press, 1980 Cui, Zheng [Author] Micro-nanofabrication : technologies and applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Beijing [u.a.]: Springer [u.a.], 2005 ; [Berlin, u.a.]: Springer, 2005 Wiest, Florian [Author] Mikrosystemtechnische Realisierung von Induktivitäten Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 2001 Published in: Berichte aus der Elektrotechnik Tönnesen, Tore Lied [Author] Mikromechanische Beschleunigungsschalter für Airbagsysteme - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 1999 Published in: Berichte aus der Mikromechanik Landis, Stefan [Editor] Nano-lithography Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Hoboken, NJ: Wiley, 2011 ; London: ISTE [u.a.], 2011 Beil, Axel [Author] Fertigung von Mikro-Bauteilen mittels Stereolithographie - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Düsseldorf: VDI-Verl., 2002 Published in: Verein Deutscher Ingenieure: Fortschritt-Berichte VDI ; 617 Thiele, Simon [Author] ; Universität Stuttgart Design, Simulation und Prozessoptimierung für das 3D-Laserdirektschreiben von Mikrooptiken Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Stuttgart: Institut für Technische Optik, Universität Stuttgart, Juli 2019 Published in: Universität Stuttgart: Berichte aus dem Institut für Technische Optik ; 98 Adams, Thomas M. [Author]; Layton, Richard A. [Author] Introductory MEMS : fabrication and applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY; Heidelberg [u.a.]: Springer, 2010 Madou, Marc J. [Author] Fundamentals of microfabrication : the science of miniaturization - [2. ed.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 2002 Hoche, Jens [Author] Technologie zur Herstellung dreidimensionaler Siliziumstrukturen Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 2000 Published in: Berichte aus der Mikro- und Feinwerktechnik ; 5 Madou, Marc J. [Author] Fundamentals of microfabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 1997 Müller, Lutz [Author] Polymere für in Abformtechnik hergestellte integriert-optische Lichtleiter - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Düsseldorf: VDI-Verl., 2000 Published in: Verein Deutscher Ingenieure: Fortschrittberichte VDI / 5 ; 57700 Nassar, Raja [Editor]; Dai, Weizhong [Other] Modelling of microfabrication systems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 2003 Published in: Microtechnology and MEMS- Physics and astronomy online library Usov, Denys [Author] Switching of surface composition and morphology of binary polymer brushes Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2004 Cappella, Brunero [Other] Filler-reinforced elastomers scanning force microscopy Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 2003 Published in: Advances in polymer science ; 164 Bargon, Joachim [Editor] ; International Symposium on Methods and Materials in Microelectronic Technology 1982 Neuenahr Methods and materials in microelectronic technology : [proc. of the Internat. Symp. on Methods and Materials in Microelectronic Technology,held Sept. 29 - Oct. 1, 1982 in Bad Neuenahr] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY [u.a.]: Plenum, 1984 Published in: IBM research symposia series
Rai-Choudhury, P. [Other] Handbook of microlithography, micromachining, and microfabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Bellingham, Wash.: SPIE Optical Engineering Pr., 19XX- ; London: Institution of Electrical Engineers, 19XX- Published in: IEE materials and devices series ; .- SPIE Press monograph ; .
Valiev, Kamilʹ A. [Author] ; Rakov, Aleksandr V. [Other] Fizičeskie osnovy submikronnoj litografii v mikroėlektronike Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Moskva: Radio i Svjazʹ, 1984
Varadan, Vijay K. [Author]; Jiang, Xiaoning [Author]; Varadan, Vasundara V. [Author] Microstereolithography and other fabrication techniques for 3D MEMS Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Chichester; Weinheim [u.a.]: Wiley, 2001
Brewer, George R. [Adapter] Ėlektronno-lučevaja technologija v izgotovlenii mikroėlektronnych priborov Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Moskva: Radio i Svjazʹ, 1984
Brewer, George R. [Editor]; Ballantyne, J. P. [Other] Electron-beam technology in microelectronic fabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY [u.a.]: Acad. Press, 1980
Cui, Zheng [Author] Micro-nanofabrication : technologies and applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Beijing [u.a.]: Springer [u.a.], 2005 ; [Berlin, u.a.]: Springer, 2005
Wiest, Florian [Author] Mikrosystemtechnische Realisierung von Induktivitäten Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 2001 Published in: Berichte aus der Elektrotechnik
Tönnesen, Tore Lied [Author] Mikromechanische Beschleunigungsschalter für Airbagsysteme - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 1999 Published in: Berichte aus der Mikromechanik
Landis, Stefan [Editor] Nano-lithography Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Hoboken, NJ: Wiley, 2011 ; London: ISTE [u.a.], 2011
Beil, Axel [Author] Fertigung von Mikro-Bauteilen mittels Stereolithographie - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Düsseldorf: VDI-Verl., 2002 Published in: Verein Deutscher Ingenieure: Fortschritt-Berichte VDI ; 617
Thiele, Simon [Author] ; Universität Stuttgart Design, Simulation und Prozessoptimierung für das 3D-Laserdirektschreiben von Mikrooptiken Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Stuttgart: Institut für Technische Optik, Universität Stuttgart, Juli 2019 Published in: Universität Stuttgart: Berichte aus dem Institut für Technische Optik ; 98
Adams, Thomas M. [Author]; Layton, Richard A. [Author] Introductory MEMS : fabrication and applications Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY; Heidelberg [u.a.]: Springer, 2010
Madou, Marc J. [Author] Fundamentals of microfabrication : the science of miniaturization - [2. ed.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 2002
Hoche, Jens [Author] Technologie zur Herstellung dreidimensionaler Siliziumstrukturen Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Aachen: Shaker, 2000 Published in: Berichte aus der Mikro- und Feinwerktechnik ; 5
Madou, Marc J. [Author] Fundamentals of microfabrication Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Boca Raton, Fla. [u.a.]: CRC Press, 1997
Müller, Lutz [Author] Polymere für in Abformtechnik hergestellte integriert-optische Lichtleiter - [Als Ms. gedr.] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Düsseldorf: VDI-Verl., 2000 Published in: Verein Deutscher Ingenieure: Fortschrittberichte VDI / 5 ; 57700
Nassar, Raja [Editor]; Dai, Weizhong [Other] Modelling of microfabrication systems Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 2003 Published in: Microtechnology and MEMS- Physics and astronomy online library
Usov, Denys [Author] Switching of surface composition and morphology of binary polymer brushes Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2004
Cappella, Brunero [Other] Filler-reinforced elastomers scanning force microscopy Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Berlin; Heidelberg [u.a.]: Springer, 2003 Published in: Advances in polymer science ; 164
Bargon, Joachim [Editor] ; International Symposium on Methods and Materials in Microelectronic Technology 1982 Neuenahr Methods and materials in microelectronic technology : [proc. of the Internat. Symp. on Methods and Materials in Microelectronic Technology,held Sept. 29 - Oct. 1, 1982 in Bad Neuenahr] Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. New York, NY [u.a.]: Plenum, 1984 Published in: IBM research symposia series
> Availability Skip to next facet Open Shelves (11) Wert ausschließen Stack Collection (9) Wert ausschließen Ask for availability (1) Wert ausschließen Show more show less
> Location Skip to next facet Departmental Library DrePunct (17) Wert ausschließen Central Library (3) Wert ausschließen TU Dresden holdings (1) Wert ausschließen Show more show less
> Rights information Skip to next facet In Copyright (1) Wert ausschließen Attribution - No Derivs (CC BY-ND) (1) Wert ausschließen Attribution - Share Alike (CC BY-SA) (1) Wert ausschließen Show more show less
> Language Skip to next facet English (25) Wert ausschließen German (19) Wert ausschließen Russian (2) Wert ausschließen French (1) Wert ausschließen Show more show less
> Subject Skip to next facet Technology (34) Wert ausschließen Physics (11) Wert ausschließen Chemistry and pharmacology (3) Wert ausschließen General sciences (2) Wert ausschließen Biology (1) Wert ausschließen Computer science (1) Wert ausschließen Show more show less
> Creator Skip to next facet Brewer, George R. (2) Wert ausschließen Hoche, Jens (2) Wert ausschließen Madou, Marc J. (2) Wert ausschließen Technische Universität Ilmenau (2) Wert ausschließen Usov, Denys (2) Wert ausschließen Adams, Thomas M. (1) Wert ausschließen Advanced Mask Technology Center (1) Wert ausschließen Ballantyne, J. P. (1) Wert ausschließen Bargon, Joachim (1) Wert ausschließen Barth, Peter (1) Wert ausschließen Behrens, Arne (1) Wert ausschließen Beil, Axel (1) Wert ausschließen Bender, Markus (1) Wert ausschließen Bhagwat, Sagar (1) Wert ausschließen Böker, Alexander (1) Wert ausschließen Cappella, Brunero (1) Wert ausschließen Cui, Zheng (1) Wert ausschließen Czarske, Jürgen (1) Wert ausschließen Dai, Weizhong (1) Wert ausschließen Erdmann, Andreas (1) Wert ausschließen Friedrich-Schiller-Universität Jena (1) Wert ausschließen Fritz, Georg Stefan (1) Wert ausschließen Goralczyk, Andreas (1) Wert ausschließen Groves, Timothy (1) Wert ausschließen Hauk, Alois (1) Wert ausschließen Helmer, Dorothea (1) Wert ausschließen Hentschel, Martina (1) Wert ausschließen Heusinger, Martin (1) Wert ausschließen Hoffmann-Urlaub, Sarah (1) Wert ausschließen International Symposium on Methods and Materials in Microelectronic Technology 1982 Neuenahr (1) Wert ausschließen Jiang, Xiaoning (1) Wert ausschließen Karlsruher Institut für Technologie Institute for Microstructure Technology (1) Wert ausschließen Klitzing, Regine von (1) Wert ausschließen Koos, Christian (1) Wert ausschließen Kotz-Helmer, Frederik (1) Wert ausschließen Krebs, Hans-Ulrich (1) Wert ausschließen Landis, Stefan (1) Wert ausschließen Lauermann, Matthias (1) Wert ausschließen Layton, Richard A. (1) Wert ausschließen Lenk, Steve (1) Wert ausschließen Lienkamp, Karen (1) Wert ausschließen Liu, Xiyuan (1) Wert ausschließen Luitz, Manuel (1) Wert ausschließen Lunzer, Markus (1) Wert ausschließen Lützenkirchen-Hecht, Dirk (1) Wert ausschließen Mader, Markus (1) Wert ausschließen Maier, Pascal (1) Wert ausschließen Müller, Lutz (1) Wert ausschließen Nassar, Raja (1) Wert ausschließen Nilsen, Madeleine (1) Wert ausschließen Rai-Choudhury, P. (1) Wert ausschließen Rakov, Aleksandr V. (1) Wert ausschließen Rangelow, Ivo W. (1) Wert ausschließen Rapp, Bastian E. (1) Wert ausschließen Ravoo, Bart Jan (1) Wert ausschließen Richter, Claudia (1) Wert ausschließen Salditt, Tim (1) Wert ausschließen Schulz, M. (1) Wert ausschließen Seidemann, Volker (1) Wert ausschließen Sichler, Philipp (1) Wert ausschließen Sinzinger, Stefan (1) Wert ausschließen Strehle, Steffen (1) Wert ausschließen Thiele, Simon (1) Wert ausschließen Trappen, Mareike (1) Wert ausschließen Tönnesen, Tore Lied (1) Wert ausschließen Universität Potsdam (1) Wert ausschließen Universität Stuttgart (1) Wert ausschließen Universität Ulm (1) Wert ausschließen Valiev, Kamilʹ A. (1) Wert ausschließen Vanguard Photonics GmbH (1) Wert ausschließen Varadan, Vasundara V. (1) Wert ausschließen Varadan, Vijay K. (1) Wert ausschließen Warmbold, Andreas (1) Wert ausschließen Widyaya, Vania Tanda (1) Wert ausschließen Wiest, Florian (1) Wert ausschließen Xu, Yilin (1) Wert ausschließen Zeitner, Uwe Detlef (1) Wert ausschließen Zimmermann, Marc (1) Wert ausschließen ficonTEC Service GmbH (1) Wert ausschließen Show more show less
> Collection Skip to next facet Verbunddaten SWB (40) Wert ausschließen Lizenzfreie Online-Ressourcen (19) Wert ausschließen Diss online (1) Wert ausschließen Show more show less