Media type: Book Title: Fundamentals of microfabrication Contributor: Madou, Marc J. [Author] imprint: Boca Raton, Fla. [u.a.]: CRC Press, 1997 Extent: 589 S.; Ill., graph. Darst Language: English ISBN: 0849394511 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) ZN 4900 : Allgemeines ZN 4980 : Mikrocontroller, Signalprozessoren ZN 3750 : Mikrosystemtechnik Keywords: Mikrosystemtechnik > Fertigungstechnik Lithografie > Mikrosystemtechnik > Mikromechanik > Entwurf > Konstruktion Origination: Footnote: url http://www.biomems.net
Departmental Library DrePunct – stack Shelf-mark: 1998 4 010104 001 Item ID: 10363918 Status: Loanable, place order > Ordering possible ‒ please log in
Departmental Library DrePunct – stack Shelf-mark: R2019 4 110 Item ID: 10364482 Notizen: 2. [print] Status: Loanable, place order > Ordering possible ‒ please log in