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Rai-Choudhury, P. [Other]

Handbook of microlithography, micromachining, and microfabrication

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Bellingham, Wash.: SPIE Optical Engineering Pr., 19XX- ; London: Institution of Electrical Engineers, 19XX-

Published in: IEE materials and devices series ; .- SPIE Press monograph ; .
Varadan, Vijay K. [Author]; Jiang, Xiaoning [Author]; Varadan, Vasundara V. [Author]

Microstereolithography and other fabrication techniques for 3D MEMS

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Chichester; Weinheim [u.a.]: Wiley, 2001
Adams, Thomas M. [Author]; Layton, Richard A. [Author]

Introductory MEMS : fabrication and applications

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New York, NY; Heidelberg [u.a.]: Springer, 2010
Hoche, Jens [Author]

Technologie zur Herstellung dreidimensionaler Siliziumstrukturen

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Aachen: Shaker, 2000

Published in: Berichte aus der Mikro- und Feinwerktechnik ; 5
Madou, Marc J. [Author]

Fundamentals of microfabrication : the science of miniaturization - [2. ed.]

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Boca Raton, Fla. [u.a.]: CRC Press, 2002
Thiele, Simon [Author] ; Universität Stuttgart

Design, Simulation und Prozessoptimierung für das 3D-Laserdirektschreiben von Mikrooptiken

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Stuttgart: Institut für Technische Optik, Universität Stuttgart, Juli 2019

Published in: Universität Stuttgart: Berichte aus dem Institut für Technische Optik ; 98
Cui, Zheng [Author]

Micro-nanofabrication : technologies and applications

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Beijing [u.a.]: Springer [u.a.], 2005 ; [Berlin, u.a.]: Springer, 2005
Madou, Marc J. [Author]

Fundamentals of microfabrication

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Boca Raton, Fla. [u.a.]: CRC Press, 1997
Cappella, Brunero [Other]

Filler-reinforced elastomers scanning force microscopy

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Berlin; Heidelberg [u.a.]: Springer, 2003

Published in: Advances in polymer science ; 164
Tönnesen, Tore Lied [Author]

Mikromechanische Beschleunigungsschalter für Airbagsysteme - [Als Ms. gedr.]

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Aachen: Shaker, 1999

Published in: Berichte aus der Mikromechanik
Nassar, Raja [Editor]; Dai, Weizhong [Other]

Modelling of microfabrication systems

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Berlin; Heidelberg [u.a.]: Springer, 2003

Published in: Microtechnology and MEMS- Physics and astronomy online library
Schulz, M. [Author]

Mikrostrukturierung präkeramischer Polymere mit Hilfe der UV-und Röntgentiefenlithografie

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https://d-nb.info/1198219033/34

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Karlsruhe: KIT-Bibliothek, 2003

Published in: Wissenschaftliche Berichte. FZKA ; 6901
Heusinger, Martin [Author] ; Zeitner, Uwe Detlef [Degree supervisor]; Erdmann, Andreas [Degree supervisor]; Czarske, Jürgen [Degree supervisor] Friedrich-Schiller-Universität Jena

Untersuchungen zu deterministischem und stochastischem Streulicht in hocheffizienten binären Beugungsgittern

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Jena, [2019?]
Behrens, Arne [Author] ; Sinzinger, Stefan [Degree supervisor]; Hentschel, Martina [Degree supervisor]; Strehle, Steffen [Degree supervisor] Technische Universität Ilmenau

Plasma based 2.5D+ micro and nanostructuring for whispering gallery mode resonators

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https://nbn-resolving.org/urn:nbn:de:gbv:ilm1-2023000351

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Ilmenau: Universitätsbibliothek, [2023?]
Sichler, Philipp [Author]

Mikrostrukturierte Fingerelektroden als Plasmaquellen

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Braunschweig: Universitätsbibliothek, 2019

Published in: Berichte aus der Mikro- und Feinwerktechnik ; 17
Hoche, Jens [Author]

Technologie zur Herstellung dreidimensionaler Siliziumstrukturen

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Braunschweig: Universitätsbibliothek, 2019

Published in: Berichte aus der Mikro- und Feinwerktechnik ; 5
Liu, Xiyuan [Author]

Design, analysis and fabrication of micro optical systems involving UV-deep lithography - with an application in atomic physics

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2008
Luitz, Manuel [Author]; Lunzer, Markus [Author]; Goralczyk, Andreas [Author]; Mader, Markus [Author]; Bhagwat, Sagar [Author]; Warmbold, Andreas [Author]; Helmer, Dorothea [Author]; Kotz-Helmer, Frederik [Author]; Rapp, Bastian E. [Author]

High resolution patterning of an organic–inorganic photoresin for the fabrication of platinum microstructures

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Weinheim: Wiley-VCH, 2021

Published in: Advanced materials ; 33, 27 (2021), 2101992
Richter, Claudia [Author]

Fertigungsmethoden zur Herstellung dreidimensionaler metallischer Mikrosysteme für Life-Science Anwendungen

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Braunschweig: Universitätsbibliothek, 2019

Published in: Berichte aus der Mikro- und Feinwerktechnik ; 38
Lauermann, Matthias [Author]; Hauk, Alois [Author] ; Vanguard Photonics GmbH

Verbundprojekt: Printed freeform micro-optics for tailored photonic assemblies - PRIMA : Teilvorhaben des Projektpartners Vanguard Photonics GmbH: "Geräte- und Prozessentwicklung für die In-Situ-Fabrikation von maßgeschneiderten strahlformenden Elementen" : Schlussbericht : Laufzeit des Vorhabens: von: 01.09.2017 bis: 28.02.2021 = Printed freeform micro-optics for tailored photonic assemblies - PRIMA : project part of Vanguard Photonics GmbH: „Hardware and process development for in-situ fabrication of tailored beam forming elements“

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Karlsruhe: Vanguard Photonics GmbH, [2021?]

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