> Mehrbändiges Werk
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1:
Handbook of microlithography, micromachining, and microfabrication 1 Microlithography P. Rai-Choudhury, ed
Bellingham, Wash.: SPIE Optical Engineering Pr., 1997
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2:
Handbook of microlithography, micromachining, and microfabrication 2 Micromachining and microfabrication P. Rai-Choudhury, ed
Bellingham, Wash.: SPIE Optical Engineering Pr., 1997