Skip to contents Piquemal, François; Morán-Meza, José; Delvallée, Alexandra; Richert, Damien; Kaja, Khaled Progress in Traceable Nanoscale Capacitance Measurements Using Scanning Microwave Microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. MDPI AG, 2021 Published in: Nanomaterials Gainutdinov, R. V.; Belugina, N. V.; Lashkova, A. K.; Shut, V. N.; Kashevich, I. F.; Mozzharov, S. E.; Tolstikhina, A. L. Scanning capacitance microscopy of TGS − TGS + Cr ferroelectric crystals Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Informa UK Limited, 2019 Published in: Ferroelectrics AGHAEI, S.; ANDREI, P.; HAGMANN, M. Extracting Impurity Locations using Scanning Capacitance Microscopy Measurements Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Universitatea Stefan cel Mare din Suceava, 2016 Published in: Advances in Electrical and Computer Engineering Szyszka, Adam; Obłąk, Michał; Szymański, Tomasz; Wośko, Mateusz; Dawidowski, Wojciech; Paszkiewicz, Regina Scanning capacitance microscopy characterization of AIIIBV epitaxial layers Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Walter de Gruyter GmbH, 2016 Published in: Materials Science-Poland Bussmann, E; Rudolph, M; Subramania, G S; Misra, S; Carr, S M; Langlois, E; Dominguez, J; Pluym, T; Lilly, M P; Carroll, M S Scanning capacitance microscopy registration of buried atomic-precision donor devices Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. IOP Publishing, 2015 Published in: Nanotechnology Moertelmaier, M.; Huber, H.P.; Rankl, C.; Kienberger, F. Continuous capacitance–voltage spectroscopy mapping for scanning microwave microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2014 Published in: Ultramicroscopy Bassani, Franck; Periwal, Priyanka; Salem, Bassem; Chevalier, Nicolas; Mariolle, Denis; Audoit, Guillaume; Gentile, Pascal; Baron, Thierry Dopant profiling in silicon nanowires measured by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Wiley, 2014 Published in: physica status solidi (RRL) – Rapid Research Letters Chang, M. N.; Hu, C. W.; Chou, T. H.; Lee, Y. J. Contrast distortion induced by modulation voltage in scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2012 Published in: Applied Physics Letters Ligor, O.; Gautier, B.; Descamps-Mandine, A.; Albertini, D.; Baboux, N.; Militaru, L. Interpretation of scanning capacitance microscopy for thin oxides characterization Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2009 Published in: Thin Solid Films Sumner, J.; Bakshi, S. Das; Oliver, R. A.; Kappers, M. J.; Humphreys, C. J. Unintentional doping in GaN assessed by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Wiley, 2008 Published in: physica status solidi (b) Giannazzo, F.; Raineri, V.; Mirabella, S.; Impellizzeri, G.; Priolo, F.; Fedele, M.; Mucciato, R. Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2006 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena Giannazzo, F.; Raineri, V.; La Magna, A.; Mirabella, S.; Impellizzeri, G.; Piro, A. M.; Priolo, F.; Napolitani, E.; Liotta, S. F. Carrier distribution in quantum nanostructures by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2005 Published in: Journal of Applied Physics Goragot, W.; Takai, M. Measurement of Shallow Dopant Profile Using Scanning Capacitance Microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. IOP Publishing, 2004 Published in: Japanese Journal of Applied Physics Feng, R.-J. Quantitative analysis of static capacitance contrast in scanning electron microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Oxford University Press (OUP), 2003 Published in: Journal of Electron Microscopy Giannazzo, F.; Goghero, D.; Raineri, V.; Mirabella, S.; Priolo, F. Scanning capacitance microscopy on ultranarrow doping profiles in Si Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2003 Published in: Applied Physics Letters Kobayashi, Kei; Yamada, Hirofumi; Matsushige, Kazumi Dopant profiling on semiconducting sample by scanning capacitance force microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2002 Published in: Applied Physics Letters Yabuhara, Hidehiko; Ciappa, Mauro; Fichtner, Wolfgang Scanning capacitance microscopy measurements using diamond-coated probes Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2002 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena Brezna, W.; Harasek, S.; Bertagnolli, E.; Gornik, E.; Smoliner, J.; Enichlmair, H. Scanning capacitance microscopy with ZrO2 as dielectric material Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2002 Published in: Journal of Applied Physics Giannazzo, F.; Raineri, V.; Priolo, F. Two dimensional boron diffusion determination by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2002 Published in: Materials Science and Engineering: B Basnar, B.; Golka, S.; Gornik, E.; Harasek, S.; Bertagnolli, E.; Schatzmayr, M.; Smoliner, J. Calibrated scanning capacitance microscopy investigations on p-doped Si multilayers Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2001 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Piquemal, François; Morán-Meza, José; Delvallée, Alexandra; Richert, Damien; Kaja, Khaled Progress in Traceable Nanoscale Capacitance Measurements Using Scanning Microwave Microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. MDPI AG, 2021 Published in: Nanomaterials
Gainutdinov, R. V.; Belugina, N. V.; Lashkova, A. K.; Shut, V. N.; Kashevich, I. F.; Mozzharov, S. E.; Tolstikhina, A. L. Scanning capacitance microscopy of TGS − TGS + Cr ferroelectric crystals Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Informa UK Limited, 2019 Published in: Ferroelectrics
AGHAEI, S.; ANDREI, P.; HAGMANN, M. Extracting Impurity Locations using Scanning Capacitance Microscopy Measurements Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Universitatea Stefan cel Mare din Suceava, 2016 Published in: Advances in Electrical and Computer Engineering
Szyszka, Adam; Obłąk, Michał; Szymański, Tomasz; Wośko, Mateusz; Dawidowski, Wojciech; Paszkiewicz, Regina Scanning capacitance microscopy characterization of AIIIBV epitaxial layers Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Walter de Gruyter GmbH, 2016 Published in: Materials Science-Poland
Bussmann, E; Rudolph, M; Subramania, G S; Misra, S; Carr, S M; Langlois, E; Dominguez, J; Pluym, T; Lilly, M P; Carroll, M S Scanning capacitance microscopy registration of buried atomic-precision donor devices Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. IOP Publishing, 2015 Published in: Nanotechnology
Moertelmaier, M.; Huber, H.P.; Rankl, C.; Kienberger, F. Continuous capacitance–voltage spectroscopy mapping for scanning microwave microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2014 Published in: Ultramicroscopy
Bassani, Franck; Periwal, Priyanka; Salem, Bassem; Chevalier, Nicolas; Mariolle, Denis; Audoit, Guillaume; Gentile, Pascal; Baron, Thierry Dopant profiling in silicon nanowires measured by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Wiley, 2014 Published in: physica status solidi (RRL) – Rapid Research Letters
Chang, M. N.; Hu, C. W.; Chou, T. H.; Lee, Y. J. Contrast distortion induced by modulation voltage in scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2012 Published in: Applied Physics Letters
Ligor, O.; Gautier, B.; Descamps-Mandine, A.; Albertini, D.; Baboux, N.; Militaru, L. Interpretation of scanning capacitance microscopy for thin oxides characterization Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2009 Published in: Thin Solid Films
Sumner, J.; Bakshi, S. Das; Oliver, R. A.; Kappers, M. J.; Humphreys, C. J. Unintentional doping in GaN assessed by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Wiley, 2008 Published in: physica status solidi (b)
Giannazzo, F.; Raineri, V.; Mirabella, S.; Impellizzeri, G.; Priolo, F.; Fedele, M.; Mucciato, R. Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2006 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Giannazzo, F.; Raineri, V.; La Magna, A.; Mirabella, S.; Impellizzeri, G.; Piro, A. M.; Priolo, F.; Napolitani, E.; Liotta, S. F. Carrier distribution in quantum nanostructures by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2005 Published in: Journal of Applied Physics
Goragot, W.; Takai, M. Measurement of Shallow Dopant Profile Using Scanning Capacitance Microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. IOP Publishing, 2004 Published in: Japanese Journal of Applied Physics
Feng, R.-J. Quantitative analysis of static capacitance contrast in scanning electron microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Oxford University Press (OUP), 2003 Published in: Journal of Electron Microscopy
Giannazzo, F.; Goghero, D.; Raineri, V.; Mirabella, S.; Priolo, F. Scanning capacitance microscopy on ultranarrow doping profiles in Si Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2003 Published in: Applied Physics Letters
Kobayashi, Kei; Yamada, Hirofumi; Matsushige, Kazumi Dopant profiling on semiconducting sample by scanning capacitance force microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2002 Published in: Applied Physics Letters
Yabuhara, Hidehiko; Ciappa, Mauro; Fichtner, Wolfgang Scanning capacitance microscopy measurements using diamond-coated probes Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2002 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Brezna, W.; Harasek, S.; Bertagnolli, E.; Gornik, E.; Smoliner, J.; Enichlmair, H. Scanning capacitance microscopy with ZrO2 as dielectric material Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. AIP Publishing, 2002 Published in: Journal of Applied Physics
Giannazzo, F.; Raineri, V.; Priolo, F. Two dimensional boron diffusion determination by scanning capacitance microscopy Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2002 Published in: Materials Science and Engineering: B
Basnar, B.; Golka, S.; Gornik, E.; Harasek, S.; Bertagnolli, E.; Schatzmayr, M.; Smoliner, J. Calibrated scanning capacitance microscopy investigations on p-doped Si multilayers Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. American Vacuum Society, 2001 Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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